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Sputter & Evaporator (Kurt J. Lesker Co.)

CVD Series    eg.  CMS-18    -   Features:         >  18" high x 20" wide cylindrical chamber         >  Available with up to 5 source ports (standard)         >  Available with up to 5 TORUS® Magnetron Sputtering Sources         >  Available with multipocket electron beam evaporation source         >  Available with multiple thermal evaporation sources         >  Accommodates substrates up to 4"
PVD Series    eg.  PVD 75    -   Features:         >  24" high x 14" wide/deep D-shape         >  Fully enclosed "zero" clean room footprint mounting         >  Available with up to 4 TORUS® circular magnetron sputtering sources         >  Available with multi-pocket electron beam evaporation source         >  Available with multiple thermal evaporation sources         >  Available with up to 6 low-temperature organic evaporation sources         >  Available with 3cm filamentless ion source system
Custom-Made Systems

For more infomation: Kurt J. Lesker Co.