Home  Our Products  By Equipment  Advanced Metrology

Advanced Metrology (Frontier Semiconductor Inc.)


Frontier Semiconductor Inc. (FSM) offers a range of advanced metrology products and solutions for semiconductor and MEMS applications, including measurement systems for film stress, wafer bow, local stress & strain in Si, SiGe and SOI.


  Optical Measurement Techniques
   -  FSM RAMAN 360 (Spectroscopy Metrology)
   -  FSM 127 (Imaging Interferometer)
   -  FSM 128 (up to 200mm)
   -  FSM 128L (up to 300mm)
   -  FSM 413 (Optical EchoProbe)
  FSM RAMAN 360 
   
  Electrical Measurement Techniques
   -  FSM RsL100 (Sheet Resistance and Leakage
      Current Mapping Tool)
   -  FSM 4PP (C2C Sheet Resistance Mapping       System)
   -  FSM MC100 (Metal Contamination Testing on
      Production Wafers)
   -  FSM EOT (CV)
   
   
  Material Characterization
   - FSM 500TC (Stress Measurement System with        Rotation)
   -  FSM 900TC (Integrated Metrology Annealing       Chamber)
   -  FSM TCVac (Integrated Metrology Annealing
      Chamber for Cu)
   -  Aquaflex (4 Point Bent System)
   -  Laminar (Quantitative Adhesion Tester)
   -  Die Flexer (Die Tester)
   

For more infomation: Frontier Semiconductor Inc.


Top    

Previous - Homepage - Forward