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Frontier Semiconductor Inc.

Frontier Semiconductor Inc. (FSM) 提供一系列先进的计量产品和半导体及，MEMS器件，范围包括测量系统为 film stress, wafer bow, local stress & strain in Si, SiGe and SOI.

光学测量技术    -  FSM RAMAN 360 (Spectroscopy Metrology)    -  FSM 127 (Imaging Interferometer)    -  FSM 128 (up to 200mm)    -  FSM 128L (up to 300mm)    -  FSM 413 (Optical EchoProbe)
电机测量技术    -  FSM RsL100 (Sheet Resistance and Leakage       Current Mapping Tool)    -  FSM 4PP (C2C Sheet Resistance Mapping       System)    -  FSM MC100 (Metal Contamination Testing on       Production Wafers)    -  FSM EOT (CV)
材料制备与表征    - FSM 500TC (Stress Measurement System with        Rotation)    -  FSM 900TC (Integrated Metrology Annealing       Chamber)    -  FSM TCVac (Integrated Metrology Annealing       Chamber for Cu)    -  Aquaflex (4 Point Bent System)    -  Laminar (Quantitative Adhesion Tester)    -  Die Flexer (Die Tester)

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